Chapter 10: Miniaturization Applications
Introduction
Definitions and Classification Method
Introduction
Definitions
MEMS
Microsystems Technology (MST)
Mechatronics
Miniature Sensors
Miniature Actuators
Microstructures or Microcomponents
Classification Method
Decision Three
Specifications
Scaling Characteristics of Micromechanisms
Checklist
Overall Market for Micromachines
Introduction
Why Use Miniaturization Technology?
From Perception to Realization
Overall MEMS Market Size
TOTAL
TOTAL
MEMS Market Characteristics
MEMS in the Automotive Market
Introduction
Pressure
Introduction and Market Perspectives
Comparison of Micromachining Approaches for Pressure Sensing
Generic Design Features
Accelerometers
Introduction and Market Perspectives
Resonant Beam Technology
Comparing Manufacturing Options for Accelerometers
Angular Rate Sensors and Gyroscopes
Background
MEMS Gyros: Market Perspectives
Conclusions
MEMS in Medical and Biomedical Markets
Introduction
Market Character
In Vitro Diagnostics
Introduction
Historical Background on MEMS in in vitro Diagnostics
Tabletop Instruments
Hand-Held Instruments
Electrochemical Sensors for Blood Electrolytes and Blood Gases
Glucose Sensors
Conclusions
In Vivo MEMS Applications
Introduction
In vivo pH and Blood Gases
In vivo Glucose Sensing
Other in vivo MEMS Devices
Miniaturization in Biomedical Instruments
Introduction
Miniaturized Well Plates
Flow Cytometry
Microphysiometry
Lab-on-a-Chip
Environmental Monitoring
Introduction
MEMS and Solid State Gas Sensors and Solid State Gas Sensor Arrays
Electrochemical Gas Sensors
Optochemical Gas Sensor
Instrumentation
Introduction
Gas Chromatography
Mass Spectrometry
Optical Absorption Instruments
Ion Mobility Spectrometer
Industrial/Automation
Introduction
ISFETs
Microhygrometer
Valves
IT/Peripheral
Introduction
Memory Read/Write Devices
Inkjet Cartridges
Other MEMS IT Applications
Telecommunications
Introduction
Optical Communications
Wireless Communications
Problems