Chapter 7: A Comparison of Miniaturization Techniques: Top-Down and Bottom-Up Manufacturing

Introduction

Absolute and Relative Tolerance in Manufacturing

Historical Note: Human Manufacturing

Section I Top-Down Manufacturing Methods

Introduction

Chemical Microfabrication

Chemical Forming

Chemical Milling

Photochemical Milling (PCM)

Photofabrication

Introduction

Photosensitive Glasses

Photosensitive Plastics

Conclusions

Electrochemical Machining

Introduction

Electrochemical Removal Processes

Electrochemical Grinding (ECG)

Electric Chemical Machining (ECM)

Electrochemical Micromachining (EMM)

Introduction

Jet–Etching and Laser-Assisted Electrochemical Etching

Scanning Electrochemical Microscope (SECM)

Through-Mask Electrochemical Micromachining

Summary

Electrochemical Forming Processes

Introduction

Micro Jet Plating and Laser-Enhanced Jet Plating

Slanted and Curved Plated Metal Shapes

Electroless Plating

Anodization

Wet versus Dry Microfabrication

Electrothermal Processes

Introduction

Electrodischarge Machining

Introduction

Sinker EDM

(WEDG)

Electron-Beam Machining

Electron-Beam Removal Process

Electron-Beam Forming Processes

Laser Machining

Introduction

Theoretical Background

Introduction

Laser Wavelength

Laser Parameter

Laser Spot Size

Average Laser Beam Intensity

Depth of Focus

Laser Pulse Length

Long Pulses

Short Pulses

Laser-Beam Removal Processes

Background

Laser Etching with Chemical Assist

Short Laser Pulse Etching

Introduction

Shot-to-Shot Repeatability

Submicron Feature Sizes

Machining Inside Transparent Materials

Problems With Short Laser Pulse Etching

Laser Removal Process Applications

Forming Processes with Laser Machining

Types of Lasers Used for Laser Machining

Conclusions

Plasma-Beam Machining

Forming Processes

Removal Processes

Mechanical Processes

Introduction

Precision Mechanical Machining versus Si Micromachining

Ultra-High Precision Mechanical Machining

Ultrasonic Machining

Water Jet, Abrasive Water Jet, and Abrasive Jet Machining

Water Jet

Abrasive Water Jet (AWJ)

Abrasive Jet Machining (AJM)

Focused Ion-Beam Milling

Other Ion Machining Techniques

Comparison of Top-Down Micromachining Techniques

Introduction

Design from the Package Inwards

Batch, Serial and Continuous

Section II Bottom-Up Approaches

Introduction

Nature’s Engineering Feats

Life?

Life on Other Planets?

Emergence of Life-Biogenesis

Introduction

DNA, RNA, and Proteins: Who was on First?

Made from Clay?

Life’s Origin Beneath the Surface?

Complexity Theory

A Model from Information and Communication Theory

Evolution

From Chemistry to Cells

Introduction

Cells

DNA—The Software of Life

Proteins (Hardware of Life)

Introduction

Making Proteins

Protein Structure

Two Example Proteins

Calmodulin

Green Fluorescent Protein (GFP)

Protein Self-Repair and Recycling

The Odds of Making Proteins

The Genetic Code

Genes and Chromosomes

Genes

Copying Errors

Transposomes

Human Genome Project

Death and Aging

How to Apply Nature’s Tools—Merging of Biotechnology with Nanofabrication

Introduction

Biotechnology

Introduction

Examples of MEMS in Life Sciences-BIOMEMS

PCR

DNA Chips

Introduction

DNA Hybridization Chips

Immunosensors

Introduction

Micromachined Immunosensors

Conclusion

Merging of Biotechnology with Nanofabrication

Hints from Nature

Fullerenes

Nanofabrication of Quantum Structures

Q Particles

The Future

EXAMPLES

7.1 An Electrochemical Immunosensor

7.2 An Optical Immunosensor

Problems