TOUR THE BOOK
Fundamentals of MICROFABRICATION
Second Edition , Dr. Marc Madou
Roadmap
Sayings
Conversion Tables
Table of Contents
Chapter 1
Lithography
Chapter 2
Pattern Transfer with Dry Etching Techniques
Chapter 3
Pattern Transfer with Additive Techniques
Chapter 4
Wet Bulk Micromachining
Chapter 5
Surface Micromachining
Chapter 6
LIGA and Micromolding
Chapter 7
A Comparison of Miniaturization Techniques:
Top-Down and Bottom-Up Manufacturing
Chapter 8
Modeling, Brains, Packaging, Sample Preparation and New MEMS Materials
Chapter 9
Scaling, Actuators and Power in Miniaturized Systems
Chapter 10
Miniaturization Applications
Appendixes
Appendix A
Metrology Techniques for MEMS
Appendix B
Living Book
Appendix C
Si and SiO
2
Etch Rates in KOH
Appendix D
Genetics
Appendix E
Suggested Further Reading
Appendix F
MEMS Companies
Appendix G
Glossary
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