Chapter 5 Surface Micromachining

1. Page 309 Legend of Figure 5.42 should read  : Schematic of two pixels in a DMDTM from Texas Instruments. By Svetlana Tatic-Lucic (Lehigh University).

2. Page 291 the link in the sentence "A tutorial on SOI can be found at http://www.sigen.com/whatissoi.html" is not availble, please go to http://www.sigen.com for information about SOI.