Errata of Second Edition
Chapter 1
Lithography
Chapter 2
Pattern Transfer with Dry Etching Techniques
Chapter 3
Pattern Transfer with Additive Techniques
Chapter 4
Wet Bulk Micromachining
Chapter 5
Surface Micromachining
Chapter 6
LIGA and Micromolding
Chapter 7
A Comparison of Miniaturization Techniques:
Top-Down and Bottom-Up Manufacturing
Chapter 8
Modeling, Brains, Packaging, Sample Preparation and New MEMS Materials
Chapter 9
Scaling, Actuators and Power in Miniaturized Systems
Chapter 10
Miniaturization Applications
MAE Department
|
UCIrvine
| GroupMember Only
Copyright © 2005 Biomems Research Group
University of California Irvine
Contact Webmaster
