Park_CV

Benjamin Y. Park

Research Interests:

1. Microfabricated Electrochemical Devices:

Fabrication and testing of microfabricated advanced batteries and fuel cells

2. Nanomanipulation:

The investigation of MEMS and NEMS platforms for transport and manipulation of biological particles such as proteins, DNA and cells. Such platforms will be very useful in advancing research in nano manufacturing, molecular diagnostics and the interface between biology and electronics. Current work is focused on FEA simulation of the electrical fields and the transport of MEMS and NEMS particles with multiple electrode configurations. Experimental work is in progress to allow verification of the model predictions.

3. Sub-micron Particle-Based Lithography

Conventional projection lithography is limited by optical diffraction. The smallest feature size achievable with conventional projection lithography techniques is approximately the length of the wavelength of the light source. With STM, electron-beam lithography, or other sequential writing schemes, smaller features can be defined, but these technologies are expensive to implement because of the serial nature of these schemes. We hope to develop a method of defining nanoscale features while retaining the ability to scale in a parallel manner. By using particles close to the substrate we are not limited by diffraction limits, (This has been demonstrated with near-field scanning optical microscopy) and we hope to be able to parallelize the process.

4. The uses of C-MEMS Structures in Liquid Environments

The use of microfabricated carbon in liquid environments is being investigated. Possible uses include electrochemical applications (battery, fuel cells, etc.), dielectrophoretic separation systems, and biomedical applications.

Education:

• Ph.D. in Mechanical and Aerospace Engineering (BioMEMS) Feb 2006
University of California, Irvine
Advisor: Professor Marc Madou

• Master of Science in Electrical and Computer Engineering May 2003
Purdue University

• Bachelor of Science in Electrical Engineering February 2001
Seoul National University, Republic of Korea

Academic & Professional Experience:

Graduate Teaching Assistant
School of Mechanical and Aerospace Engineering, University of California, Irvine

• MAE91 Introduction to Thermodynamics Spring 2005
• MAE170 Introduction to Control Systems Winter 2005

School of Electrical and Computer Engineering, Purdue University

• EE305 Semiconductor Devices Spring 2002, Fall 2002, Spring 2001
• EE201 Linear Circuit Theory Summer 2002, Fall 2001

        Researcher/Programmer
        Arum Communications Co., Ltd. December 2000 - June 2001
        • Programming using Visual C++ and ActiveX:
        Network management software: Arum Network Manager
        Storage sharing solutions for IPs : TwinHDD

Freelance Translator

Seoul Freelancer Group
•Translating papers

Publications:

CHAPTERS

•Benjamin Y. Park, Rabih Zaouk, and Marc J. Madou, "Microlithography for Microfabrication," The Electrical Engineering Handbook, 3rd Edition- Electronics, Power Electronics, Optoelectronics, Microwaves, Electromagnetics, and Radar, ed: R.C. Dorf, CRC Press, Boca Raton, FL, 2006

•Benjamin Y. Park, Rabih Zaouk, Marc J. Madou, "Fabrication of Microelectrodes Using the Lift-off Technique," in Methods in Molecular Biology - Microfluidics Techniques, ed: Shelley D. Minteer, Humana Press, St. Louis, MO, 2006

•Rabih Zaouk, Benjamin Y. Park, Marc J. Madou, "Fabrication of PDMS Microfluidics Using SU-8 Molds," in Methods in Molecular Biology - Microfluidics Techniques, ed: Shelley D. Minteer, Humana Press, St. Louis, MO, 2006

•Rabih Zaouk, Benjamin Y. Park, and Marc J. Madou,, "Photolithography as a Microfabrication Technique," in Methods in Molecular Biology - Microfluidics Techniques, ed: Shelley D. Minteer, Humana Press, St. Louis, MO, 2006

JOURNAL PAPERS

•Benjamin Y Park, Rabih Zaouk, Chunlei Wang, and Marc Madou, "A Case for Fractal Electrodes in Electrochemical Applications," Journal of The Electrochemical Society, 154, 2, P1-P5, 2007

•Benjamin Y Park and Marc Madou, "Design, Fabrication, and Initial Testing of a Miniature PEM Fuel Cell with Micro-scale Pyrolyzed Carbon Fluidic Plates," Journal of Power Sources 162, 369–379, 2006

•Benjamin Y Park and Marc Madou, "3D Electrode Designs for Flow-Through Dielectrophoretic Systems," Electrophoresis, Volume 26, Issue 19, pg. 3745-3757, 2005

•Benjamin Y. Park, Lili Taherabadi, Chunlei Wang, Jim Zoval, and Marc J. Madou, "Electrical Properties and Shrinkage of Carbonized Photoresist Films and the Implications for C-MEMS Devices in Conductive Media," J. Electrochem. Soc. 152, J136, 2005

•Benjamin Yong Park, Alan Paradiso, Matt Kawabe, Marc J Madou, "A Novel Dielectrophoretic Oil Filter", Proceedings of the Institution of Mechanical Engineers -- Part D -- Journal of Automobile Engineering, Vol. 220, Issue 4, p481-496, 2006

•Lili Taherabadi, Benjamin Y. Park, Chunlei Wang and Marc Madou, "Multilayer carbon-microelectromechanicalsystems (C-MEMS) structures and applications," to be submitted, unpublished

CONFERENCE PAPERS

•Benjamin Y Park, Rabih Zaouk, Marc Madou, "Validation of Lithography Based on the Controlled Movement of Light-emitting Particles," SPIE Microlithography, Emerging Lithographic Technologies VIII, 2004

•Benjamin Y. Park, Rabih Zaouk, Chunlei Wang, Marc J. Madou, "Fractal Carbon-MEMS Architectures for 3D Miniature Power and Sensor Applications", Three-Dimensional Micro- and Nanoscale Battery Architectures in ECS Transactions, Vol. 1

•Benjamin Y. Park, Alan Paradiso, Matt Kawabe, and Marc J. Madou, "Novel Dielectrophoretic Filtration Methods and Designs", Novel Materials and Integration Techniques II, SPIE 13th Annual Symposium, Smart Structures and Materials 2006

•Benjamin Y. Park, Rabih Zaouk, Chunlei Wang, Jim Zoval, and Marc J. Madou, "Fractal Carbon-MEMS Electrodes: Theory and Preliminary Fabrication", SBMicro 2006 - Chip on the Mountains, Session A: MEMS: DEVICES, STRUCTURES AND ISSUES I, Ouro Preto, Brazil, August 29, 2006

•Benjamin Y. Park and Marc J. Madou, "Miniature PEM Fuel Cell with Pyrolyzed Carbon Microfluidic Plates", PowerMEMS 2006, Berkeley, CA

UNDERGRADUATE THESIS

•Benjamin Park, "Simulation of a 36 DOF humanoid biped robot," Seoul National University, February, 2001

TALKS

•Benjamin Park, Rabih Zaouk, Marc Madou, "Validation of Lithography Based on the Controlled Movement of Light-emitting Particles," SPIE Microlithography, Emerging Lithographic Technologies VIII, February 26, 2004

•Benjamin Y. Park, Alan Paradiso, Matt Kawabe, and Marc J. Madou, "Novel Dielectrophoretic Filtration Methods and Designs", Novel Materials and Integration Techniques II, SPIE 13th Annual Symposium, Smart Structures and Materials 2006

PATENTS

•"High Aspect Ratio C-MEMS Architecture", United States Patent Application 20050255233 filed on 2/11/2005

"Surface / Composition Enhancements to High Aspect Ratio C-MEMS", United States Patent Application 20060068107 filed in March, 2005

DISCLOSURES

•UCI Case No. 2004-621-1 "Method of Fabrication of Self-Enclosed Microchannels and/or Chambers With or Without Integrated Interconnects and Electrodes"

•UCI Case No. 2005-047-1 "Method of Nanotexturing of Carbon Surfaces of High-Aspect-Ratio Carbon-MEMS (C-MEMS) Devices"

•UCI Case No. 2005-048-1 "Method of Self-Aligned Insulation of Interconnects to High-Aspect-Ratio Structures"

•UCI Case No. 2005-216-1 "Multilayer Carbon Microelectromechanical Systems (C-MEMS)"

•UCI Case No. 2005-252-1 "Method and Apparatus of Using 3D Conductive Structures in Dielectrophoretic Separation Applications"

•UCI Case No. 2005-399-1 "Metal Interconnects for Use in Carbon Microelectromechanical Systems (C-MEMS)"

•UCI Case No. 2006-011-1 "Methods for More Efficient Current Collection in Carbon Electrodes"

•UCI Case No. 2006-012-1 "Methods of Obtaining Porous C-MEMS Electrodes"

•UCI Case No. 2006-420-1 "Miniature Fuel Cells Comprised of Miniature Carbon Fluidic Plates"

•UCI Case No. 2007-276-1 "Carbon Electrodes For Electrochemical Applications Fabricated By 1. Bonding Polyimide Sheets and Using A Sacrificial and/or 2. Reactive Etching of Polyimide"

PROJECTS

•Miniature fuel cell made with carbon fluidic plates (smallest fuel cell with carbon fluidic plates)

•C-MEMS dielectrophoretic devices for higher separation efficiency

•Investigation of particle-based lithography using light-emitting particles and electrokinetic manipulation.

•Investigation of 3D lithography for use in medical electronics (in collaboration with Medconx).

•C-MEMS dielectrophoretic devices (in collaboration with Nanogen)

•Fabrication of a miniaturized carbon electrode platform for Biomex.

•Design of Silicon Membrane Pressure Transducers

•Design and implementation of an adaptive Dynamic Noise Reduction (DNR) System using the TMS320VC54X DSP

•3D Simulation of a 36 DOF humanoid biped robot that accepts torque inputs and interacts with its virtual

environment by accepting external forces

•Design and development of the CMB/UCI C-MEMS Lithium-ion battery