BOOKS

Madou, M. J. (2009) From MEMS to Bio-mems and Bio-nems: Manufacturing Techniques and Applications, CRC Press

Madou, M. J. (2009) Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology, CRC Press

Madou, M. J. (2009) Manufacturing Techniques for Microfabrication and Nanotechnology, CRC Press

Madou, M. J. (2009) Solid State Physics in Microfabrication and Nanotechnology, CRC Press

Madou, M. J. (2002). Fundamentals of Microfabrication. (2nd ed.). CRC Press.

Madou, M. J. (1997). Fundamentals of Microfabrication. CRC Press. (Graduate level introduction to microfabrication. Fifth printing, Fall 2000).

Madou, M. J., Morrison, S. R. (1989). Chemical Sensing with Solid State Devices. Academic Press. (Graduate level introduction to solid state chemical sensors).

Madou, M. J., Gaisford, G. S., Gentile, F. (1987). Chemical Sensors, Business Intelligence Program. 751 SRI International.

BOOKS EDITED

Ehmann, K. F., Bourell, D., Culpepper, M. L., Hodgson, T. J., Kurfess, T. R., Madou, M. J., Rajurkar, K., Devor, R. (Eds.), (2007). Micromanufacturing: International Assessment of Research and Development.

Deen M. J. , Landheer D.,Kranz C. (Editors), (2007) Bioelectronics, Biointerfaces, and Biomedical Applications 2

Madou Marc J. , Ayon Arturo A. ,Lavan David A. ,Buchheit Thomas E. (Eds.) (2003), Nano- And Microelectromechanical Systems (Nems and Mems) and Molecular Mac Hines.

LaVan, D. A., Ayon, A. A., Buchheit, T. E., Madou, M. J. (Eds.), (2003). Micro- and Nanoystems (NEMS and MEMS) and Molecular machines. Boston: MRS. Materials Research Society. Symposium Proceedings. (Fall Meeting 2003).

LaVan, D. A., Ayon, A. A., Buchheit, T. E., Madou, M. J., McNie, M. E., Prasad, S. V. (Eds.), (2002). Nano-and Micromechanical Systems (NEMS and MEMS) and Molecular machines. Boston: MRS. Materials Research Society. Symposium Proceedings. (Fall Meeting 2002).

Madou, M. J., Oh, S., de Schutter, F. (Eds.), (1992). 24th Course: Solid State Ionics for Sensors and Electrochromics. Erice, Sicily.

Madou, M. J., Joseph, J. (Eds.), (1991). Opportunities for Innovation: Chemical and Biological Sensors Washington: National Institute of Science and Technology. NIST Publication GCR 91-593-1.

Madou, M. J. (Ed.), (1987). Chemical Sensors for Extreme Environments. SRI Microscience Program.

BOOK CHAPTERS

Chemical Sensors for Extreme Environments, SRI Microscience Program volume on Sensors, Chapter, Co-Editor, 1987.

Applications of Micromachining in Solid-State Chemical Sensors, M. Madou and J. Joseph, Eds. in "Opportunities for Innovation: Chemical and Biological Sensors Washington: National Institute of Science and Technology (1991). NIST Publication GCR 91-593-1 [Oct. 1991].

Overview of Solid Electrolytes for Sensors, Proceedings of the International School of Materials Science and Technology. 24th Course: Solid State Ionics for Sensors and Electrochromics Erice-Sicily: 1-12 July 1992, Madou, M. J., S. Oh, and F. de Schutter, Eds. 1992.

Integrated Circuit Manufacturing Techniques Applied to Microfabrication, M. J. Madou and Hyunok Lynn Kim, Chapter 3 in Handbook of Chemical and Biological Sensors, edited by R. F. Taylor and J. S. Schultz for OIP, 1996.

Facilitating Choices of Machining Tools and Materials for ‘Miniaturization Science’: A Review, M. J. Madou inTribology Issues and Opportunities in MEMS, Proceedings of the NSF/AFOSR/ASME Workshop held in Columbus, Ohio, USA, 9-11 November 1997, edited by Bharat Bhushan for Kluwer Academic Publishers.

Author of two chapters forThe MEMS Handbook, CRC Press, 2001.

Madou, M. J. and Zhou, H Microscale Manufacturing Process. The CRC Handbook of Mechanical Engineering, 2nd Edition, 2004. edited by Frank Kreith and Yogi Goswami.

B. Y. Park; Zaouk, R. and Madou, M. J. Microlithography for Microfabrication. The Electrical Engineering Handbook, 3rd Edition, CRC Press, 2004.

Jia, G.; Madou, M. J. MEMS Fabrication. The MEMS Handbook, 2nd Edition, CRC Press, edited by Mohamed Gad-el-Hak , 2004

Jia, G.; Madou, M. J. LIGA and Other Replication Techniques. The MEMS Handbook, 2nd Edition, CRC Press, edited by Mohamed Gad-el-Hak , 2004.

Lee, L. J.; Yu, L.; Koelling, K. W. and Madou, M. J. Injection Molding for Microfluidic Applications. Precision Injection Molding, Edited by Greener, J. and Wimberger-Friedl, R., Hanser/Gardner Publications, 2004.

Benjamin Y Park, Rabih Zaouk, Marc Madou, “Validation of Lithography Based on the Controlled Movement of Light-emitting Particles”, SPIE Microlithography, Emerging Lithographic Technologies VIII, 2004.

Madou, M.J. Microelectromechanical Systems MEMS) Manufacturing. Encyclopedia of Biomaterials and Biomedical Engineering, E-EBBE 120013935, Marcel Dekker, Inc., 2004.

R. Zaouk, B.Y. Park, M.J. Madou, “Photolithography as a Microfabrication Technique,” in Methods in Molecular Biology – Microfluidics Techniques, ed: Shelley D. Minteer, Humana Press, St. Louis, MO, 2006.

R. Zaouk, B.Y. Park, M.J. Madou, “Fabrication of PDMS Microfluidics Using SU-8 Molds,” in Methods in Molecular Biology – Microfludics Techniques, ed: Shelley D. Minteer, Humana Press, St. Louis, MO, 2006.

B.Y. Park, R. Zaouk, M.J. Madou, “Fabrication of Microelectrodes Using the Lift-off Technique,” in Methods in Molecular Biology – Microfluidics Techniques, ed: Shelley D. Minteer, Humana Press, St. Louis, MO, 2006.

B.Y. Park, R. Zaouk, M.J. Madou, “Microlithography for Microfabrication”, The Electrical Engineering Handbook, 3rd Edition-Electronics, Power Electronics, Optoelectronics, Microwaves, Electromagnetics, and Radar, ed: R.C. Dorf, CRC press, Boca Raton, FL, 2006.

Rajurkar, K., Madou, M. J. (2007). “Processes.” In Ehmann, K. F., Bourell, D., Culpepper, M. L., Hodgson, T. J., Kurfess, T. R., Madou, M. J., Rajurkar, K., DeVor, R., Micromanufacturing: International Assessment of Research and Development. Chapter 4. Springer.

Madou, M. J. (2007). “Non-Lithography Applications.” In Ehmann, K. F., Bourell, D., Culpepper, M. L., Hodgson, T. J., Kurfess, T. R., Madou, M. J., Rajurkar, K., DeVor, R., Micromanufacturing: International Assessment of Research and Development. Chapter 6. Springer.

BOOKS REVIEWED

Madou, M. J. (2003). Optics & Photonics News. 14. (Review by Bogdan Hoanca).

INSTRUCTOR'S MANUAL

Madou, M. J. (2004). On-line answer book for instructors using Fundamentals of Microfabrication 2nd Edition [Instructor's Manual].