BIOMEMES

Fundamentals of Microfabrication

MAE 252

Dr. Marc Madou
Location: DBH 1431
Time: TuTh, 11:00-12:30pm

Midterm Key Now Available!

Class Materials
Syllabus

Lectures
Class 1 - Quantum Mechanics 1
Class 2 - Quantum Mechanics 2
Class 3 - Photonics Crystals and Metamaterials
Class 4 - History
Class 5 - Lithography 1
Class 6 - Lithography 2
Class 7 - Dry Etching
Class 8 - Wet Bulk Micromachining
Class 9 - CVD and PVD
Class 10 - Surface Micromachining
Class 11 - LIGA
Class 12 - BioMEMS - Madou Lab







UC Irvine

Go to...