BOOKS

1. Madou, M. J. (2009) From MEMS to Bio-mems and Bio-nems: Manufacturing Techniques and Applications, CRC Press
2. Madou, M. J. (2009) Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology, CRC Press
3. Madou, M. J. (2009) Manufacturing Techniques for Microfabrication and Nanotechnology, CRC Press
4. Madou, M. J. (2009) Solid State Physics in Microfabrication and Nanotechnology, CRC Press
5. Madou, M. J. (2002). Fundamentals of Microfabrication. (2nd ed.). CRC Press.
6. Madou, M. J. (1997). Fundamentals of Microfabrication. CRC Press. (Graduate level introduction to microfabrication. Fifth printing, Fall 2000).
7. Madou, M. J., Morrison, S. R. (1989). Chemical Sensing with Solid State Devices. Academic Press. (Graduate level introduction to solid state chemical sensors).
8. Madou, M. J., Gaisford, G. S., Gentile, F. (1987). Chemical Sensors, Business Intelligence Program. 751 SRI International.

   BOOKS EDITED

9. Ehmann, K. F., Bourell, D., Culpepper, M. L., Hodgson, T. J., Kurfess, T. R., Madou, M. J., Rajurkar, K., Devor, R. (Eds.), (2007). Micromanufacturing: International Assessment of Research and Development.
10. Deen M. J. , Landheer D.,Kranz C. (Editors), (2007) Bioelectronics, Biointerfaces, and Biomedical Applications 2
11. Madou Marc J. , Ayon Arturo A. ,Lavan David A. ,Buchheit Thomas E. (Eds.) (2003), Nano- And Microelectromechanical Systems (Nems and Mems) and Molecular Mac Hines.
12. LaVan, D. A., Ayon, A. A., Buchheit, T. E., Madou, M. J. (Eds.), (2003). Micro- and Nanoystems (NEMS and MEMS) and Molecular machines. Boston: MRS. Materials Research Society. Symposium Proceedings. (Fall Meeting 2003).
13. LaVan, D. A., Ayon, A. A., Buchheit, T. E., Madou, M. J., McNie, M. E., Prasad, S. V. (Eds.), (2002). Nano-and Micromechanical Systems (NEMS and MEMS) and Molecular machines. Boston: MRS. Materials Research Society. Symposium Proceedings. (Fall Meeting 2002).
14. Madou, M. J., Oh, S., de Schutter, F. (Eds.), (1992). 24th Course: Solid State Ionics for Sensors and Electrochromics. Erice, Sicily.
15. Madou, M. J., Joseph, J. (Eds.), (1991). Opportunities for Innovation: Chemical and Biological Sensors Washington: National Institute of Science and Technology. NIST Publication GCR 91-593-1.
16. Madou, M. J. (Ed.), (1987). Chemical Sensors for Extreme Environments. SRI Microscience Program.

    BOOK CHAPTERS

17. Salar Soroori, Lawrence Kulinsky, Marc Madou, “Centrifugal Microfluidics; Characteristics & Possibilities”. Microfluidics and Microscale Transport Processes – edited by Suman Chakraborty Ph.D. CRC Press – 2012
18. BioMEMs for Drug Delivery by Lawrence Kulinsky and Marc Madou. MEMS for biomedical applications edited by Shekhar Bhansali, PhD; Microfluidic Diagnostics: Methods and Protocols, Volume 1: Fabrication and Manipulation Protocols edited by Colin D. Mansfield, PhD; Gareth Jenkins, PhD; Woodhead Publishing. Submitted: July 29, 2011
19. Present Technology and Future Trends in Point of Care Microfluidic Diagnostics by Lawrence Kulinsky, Zahra Noroozi, Marc Madou. Microfluidic Diagnostics: Methods and Protocols, Volume 1: Fabrication and Manipulation Protocols edited by Colin D. Mansfield, PhD; Gareth Jenkins, PhD; Humana Press, Springer Science + Business Media LLC. Accepted for publication without revisions June 28, 2011.
20. Kulinsky L., Noroozi Z., and Madou M. Present Technology and Future Trends in Point of Care Microfluidic Diagnostics. Microfluidic Diagnostics: Methods and Protocols, Volume 1: Fabrication and Manipulation Protocols. Edited by Mansfield, C. D. and Jenkins G. Humana Press. 2001.
21. Chemical Sensors for Extreme Environments, SRI Microscience Program volume on Sensors, Chapter, Co-Editor, 1987.
22. Applications of Micromachining in Solid-State Chemical Sensors, M. Madou and J. Joseph, Eds. in "Opportunities for Innovation: Chemical and Biological Sensors Washington: National Institute of Science and Technology (1991). NIST Publication GCR 91-593-1 [Oct. 1991].
23. Overview of Solid Electrolytes for Sensors, Proceedings of the International School of Materials Science and Technology. 24th Course: Solid State Ionics for Sensors and Electrochromics Erice-Sicily: 1-12 July 1992, Madou, M. J., S. Oh, and F. de Schutter, Eds. 1992.
24. Integrated Circuit Manufacturing Techniques Applied to Microfabrication, M. J. Madou and Hyunok Lynn Kim, Chapter 3 in Handbook of Chemical and Biological Sensors, edited by R. F. Taylor and J. S. Schultz for OIP, 1996.
25. Facilitating Choices of Machining Tools and Materials for ‘Miniaturization Science’: A Review, M. J. Madou inTribology Issues and Opportunities in MEMS, Proceedings of the NSF/AFOSR/ASME Workshop held in Columbus, Ohio, USA, 9-11 November 1997, edited by Bharat Bhushan for Kluwer Academic Publishers.
26. Author of two chapters forThe MEMS Handbook, CRC Press, 2001.
27. Madou, M. J. and Zhou, H. Microscale Manufacturing Process. The CRC Handbook of Mechanical Engineering, 2nd Edition, 2004. edited by Frank Kreith and Yogi Goswami.
28. B. Y. Park; Zaouk, R. and Madou, M. J. Microlithography for Microfabrication. The Electrical Engineering Handbook, 3rd Edition, CRC Press, 2004.
29. Jia, G.; Madou, M. J. MEMS Fabrication. The MEMS Handbook, 2nd Edition, CRC Press, edited by Mohamed Gad-el-Hak , 2004
30. Jia, G.; Madou, M. J. LIGA and Other Replication Techniques. The MEMS Handbook, 2nd Edition, CRC Press, edited by Mohamed Gad-el-Hak , 2004.
31. Lee, L. J.; Yu, L.; Koelling, K. W. and Madou, M. J. Injection Molding for Microfluidic Applications. Precision Injection Molding, Edited by Greener, J. and Wimberger-Friedl, R., Hanser/Gardner Publications, 2004.
32. Benjamin Y Park, Rabih Zaouk, Marc Madou, “Validation of Lithography Based on the Controlled Movement of Light-emitting Particles”, SPIE Microlithography, Emerging Lithographic Technologies VIII, 2004.
33. Madou, M.J. Microelectromechanical Systems MEMS) Manufacturing. Encyclopedia of Biomaterials and Biomedical Engineering, E-EBBE 120013935, Marcel Dekker, Inc., 2004.
34. R. Zaouk, B.Y. Park, M.J. Madou, “Photolithography as a Microfabrication Technique,” in Methods in Molecular Biology – Microfluidics Techniques, ed: Shelley D. Minteer, Humana Press, St. Louis, MO, 2006.
35. R. Zaouk, B.Y. Park, M.J. Madou, “Fabrication of PDMS Microfluidics Using SU-8 Molds,” in Methods in Molecular Biology – Microfludics Techniques, ed: Shelley D. Minteer, Humana Press, St. Louis, MO, 2006.
36. B.Y. Park, R. Zaouk, M.J. Madou, “Fabrication of Microelectrodes Using the Lift-off Technique,” in Methods in Molecular Biology – Microfluidics Techniques, ed: Shelley D. Minteer, Humana Press, St. Louis, MO, 2006.
37. B.Y. Park, R. Zaouk, M.J. Madou, “Microlithography for Microfabrication”, The Electrical Engineering Handbook, 3rd Edition-Electronics, Power Electronics, Optoelectronics, Microwaves, Electromagnetics, and Radar, ed: R.C. Dorf, CRC press, Boca Raton, FL, 2006.
38. Rajurkar, K., Madou, M. J. (2007). “Processes.” In Ehmann, K. F., Bourell, D., Culpepper, M. L., Hodgson, T. J., Kurfess, T. R., Madou, M. J., Rajurkar, K., DeVor, R., Micromanufacturing: International Assessment of Research and Development. Chapter 4. Springer.
39. Madou, M. J. (2007). “Non-Lithography Applications.” In Ehmann, K. F., Bourell, D., Culpepper, M. L., Hodgson, T. J., Kurfess, T. R., Madou, M. J., Rajurkar, K., DeVor, R., Micromanufacturing: International Assessment of Research and Development. Chapter 6. Springer.

    BOOKS REVIEWED

40. Madou, M. J. (2003). Optics & Photonics News. 14. (Review by Bogdan Hoanca).

    INSTRUCTOR'S MANUAL

41. Madou, M. J. (2004). On-line answer book for instructors using Fundamentals of Microfabrication 2nd Edition [Instructor's Manual].