CONTINUALLY UPDATED Answer SETS PER CHAPTER

Fundamentals of MICROFABRICATION
Second Edition , Dr. Marc Madou

 
To instructors: You need username and password to access the answers to the problems in Fundamentals of Microfabrication (second edition) (pdf files). Please call 949-824-6585 or write an eamil to Dr. Marc Madou at madsense@aol.com to request the username and password for free, don't forget to confirm your professor/instructor status on the phone or in the eamil.
Chapter 1 Lithography
Chapter 2 Pattern Transfer with Dry Etching Techniques
Chapter 3 Pattern Transfer with Additive Techniques
Chapter 4 Wet Bulk Micromachining
Chapter 5 Surface Micromachining
Chapter 6 LIGA and Micromolding
Chapter 7 A Comparison of Miniaturization Techniques: 
Top-Down and Bottom-Up Manufacturing
Chapter 8 Modeling, Brains, Packaging, Sample Preparation and New MEMS Materials
Chapter 9 Scaling, Actuators and Power in Miniaturized Systems
Chapter 10 Miniaturization Applications
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